High q u a l i t y superconducting t h i n films of the high Tc compound YBa2Cu307 have been prepared on sapphire using a new, simple method that combines d.c. magnetron sputtering from a single target and evaporation from a heated source. The method should be expecially suitable f o r depositing t h i n films on complex surfaces. (onset) were prepared using an YCu3 target and evaporating barium by a specially designed, feedback controlled, molybdenum heater using both pure barium or a barium-alluminum alloy. The films were characterized by X-rays, Electron Dispersion Spectroscopy and other techniques-
A SIMPLE METHOD FOR PREPARING SUPERCONDUCTING HIGH-TC THIN-FILMS
ROMANO P;
1989-01-01
Abstract
High q u a l i t y superconducting t h i n films of the high Tc compound YBa2Cu307 have been prepared on sapphire using a new, simple method that combines d.c. magnetron sputtering from a single target and evaporation from a heated source. The method should be expecially suitable f o r depositing t h i n films on complex surfaces. (onset) were prepared using an YCu3 target and evaporating barium by a specially designed, feedback controlled, molybdenum heater using both pure barium or a barium-alluminum alloy. The films were characterized by X-rays, Electron Dispersion Spectroscopy and other techniques-File in questo prodotto:
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